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Books by Miko Elwenspoek






Sensor Technology 2001
Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001 (Astrophysics and Space Science Library)
by Miko Elwenspoek
Hardcover, 200 Pages, Published 2001 by Springer
ISBN-13: 978-0-7923-7012-3, ISBN: 0-7923-7012-0






Silicon Micromachining(Updated)
(Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
by Miko Elwenspoek, Henri V. Jansen, Haroon Ahmad, Michael Pepper, Alec Broers, The Netherlands, Henri V.
Paperback, 420 Pages, Published 2004 by Cambridge University Press
ISBN-13: 978-0-521-60767-4, ISBN: 0-521-60767-1






Materials for Mechanical and Optical Microsystems(1st Edition)
Volume 444 (MRS Proceedings)
by Miko Elwenspoek, Hiroyuki Fujita, Stefan Johansson, Ernst Obermeier, Yuji Uenishi, Michael L. Reed
Hardcover, 242 Pages, Published 1997 by Materials Research Society
ISBN-13: 978-1-55899-348-8, ISBN: 1-55899-348-7






IEEE micro electro mechanical systems
An investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
by Koji Ikuta, Miko Elwenspoek, Et.Al. Higuchi, Toshiro Higuchi, Micromachine Center
Hardcover, 360 Pages, Published 1994 by Institute Of Electrical And Electronics Engineers]
ISBN-13: 978-0-7803-1834-2, ISBN: 0-7803-1834-X






Silicon Micromachining(1st Edition)
(Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)
by M. Elwenspoek, H. V. Jansen, Henrik M. Jansen
Hardcover, 420 Pages, Published 1999 by Cambridge University Press
ISBN-13: 978-0-521-59054-9, ISBN: 0-521-59054-X






Sensor Technology 2001(Reprint)
Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001
by Miko Elwenspoek
Paperback, 200 Pages, Published 2001 by Springer
ISBN-13: 978-94-010-3841-6, ISBN: 94-010-3841-4






Mechanical Microsensors
(Microtechnology and MEMS)
by Miko Elwenspoek, Remco J. Wiegerink
Hardcover, 295 Pages, Published 2001 by Springer
ISBN-13: 978-3-540-67582-2, ISBN: 3-540-67582-5






Mechanical Microsensors(Reprint)
(Microtechnology and MEMS)
by Miko Elwenspoek, R. Wiegerink
Paperback, 295 Pages, Published 2010 by Springer
ISBN-13: 978-3-642-08706-6, ISBN: 3-642-08706-X






Mechanical Microsensors
by Miko Elwenspoek, R. Wiegerink
295 Pages, Published 2012 by Springer Science & Business Media
ISBN-13: 978-3-662-04321-9, ISBN: 3-662-04321-1






Sensor Technology 2001
Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14–15 May, 2001
by Miko Elwenspoek
200 Pages, Published 2011 by Springer Science & Business Media
ISBN-13: 978-94-010-0840-2, ISBN: 94-010-0840-X

All Authors

Miko Elwenspoek

Michael Pepper

Haroon Ahmad

Henri Jansen

Henri

The Netherlands

Alec Broers

Yuji Uenishi

Michael Reed

Hiroyuki Fujita


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